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Produits discontinués

XL*, Vanne coudée pour vide élevé, commande pneumatique

XL*, Vanne coudée pour vide élevé, commande pneumatique

SMC

SMC

A high vacuum angle valve with initial exhaust valve with adjustable flow rate.
[Features]
· Initial exhaust valve and main exhaust valve are integrated (two-step flow rate control valve).
· Allows for compact system designs and reduced piping.
· Prevents dust turbulence inside the chamber when exhausting.
· Prevents pumps from running when overloaded.
· Its low outgassing enables use with a smaller pump capacity and helps reduce exhaust time.
· Does not contain heavy metals such as Ni (nickel) or Cr (chrome).
· Low sputtering yield minimizes heavy metal contamination of wafers.

(i)Remarque

  • ■ SMC Product Line
    Webpages for products currently without individual pages on this site will be released on an ad-hoc basis.

    ■ Products Planned for Online Release
    Air cylinder-related product pages will be released on this site on an ad-hoc basis.
    CQ2/MG types, etc., are already available.
    *Vacuum equipment, FRLs, solenoid valves, etc., will also be released on dedicated pages on this site on an ad-hoc basis.
    *The information above is correct as of December 2018.
  • The product images may be representative images only. Refer to the manufacturer's catalog for shape details.

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Aluminum High Vacuum Angle Valve, 2-Step Control, Single Acting, Bellows Seal, O-Ring Seal, XLD Series Specifications

XLD Series external appearance

XLD Series external appearance

XLD Series operating port direction

XLD Series operating port direction

Model XLD-25 XLD-40 XLD-50 XLD-63 XLD-80
Valve Type Always closed (spring return and seal) (both main and initial exhaust valves)
Fluids Inert gas vacuum
Operating Temperature (°C) XLD 5 to 60 (5 to 150 for high temperature type)
Operating Pressure Pa (abs) 1 ×; 10-6 to atmospheric pressure
Conductance L/s Note 1: Main Exhaust Valve 14 45 80 160 200
Initial Exhaust Valve 0.5 to 3 2 to 8 2.5 to 11 4 to 18 4 to 18
Amount of leakage Pa·m3/s Internal For standard material (FKM): 1.3 ×; 10-10, values at normal temperature and excluding gas permeation
External For standard material (FKM): 1.3 ×; 10-11, values at normal temperature and excluding gas permeation
Flange Type KF (NW) KF (NW) / K (DN)
Main Material Note 3: Main body: aluminum alloy, Bellows: SUS316L, Main parts: stainless steel, FKM (standard sealing material)
Surface Treatment External: hard anodized aluminum, Internal: base material
Pilot Pressure MPa (G) 0.4 to 0.7 (both main and initial exhaust valves)
Pilot Port Connection Port Diameter XLD M5 Rc 1/8
Weight (kg) XLD 0.5 1.2 1.8 3.4 5.6

Note 1: The main exhaust valve conductance is the value for the "molecular flow" of an elbow with the same dimensions. The initial exhaust valve conductance is the "viscous flow" value.
Note 2: For valve heater specifications, see "Common Option (1) Heater" in the manufacturer's catalog.
Note 3: A coating of vacuum grease (Y-VAC2) has been applied to the seal-material sliding section (initial exhaust valve sliding part) of the vacuum part.

Product Drawing

XLD air-operated type dimensional drawing

XLD air-operated type dimensional drawing

 

(Unit: mm)

 

Model A B C D E Fn Fd G H J K
XLD-25 50 123 48 1 12 40 - 26 41 16 7.5
XLD-40 65 170 66 2 11 55 - 41 63 20 15
XLD-50 70 183 79 2 11 75 - 52 68 20 17.5
XLD-63 88 217 100 3 11 87 95 70 72 20 20
XLD-80 90 256 117 3 11 114 110 83 98 20 26.5

Note 1: Dimension E applies when heater option is included. (Lead wire length: approx. 1 m)
Note 2: A, B, and C in the figure above indicate the heater mounting positions. The heater mounting positions differ by the heater type. Refer to the manufacturer's catalog for replacement heater part numbers and mounting positions.

Product Diagram

XLD Series diagram

XLD Series diagram

*Refer to the manufacturer's catalog for maintenance parts.

Product Working Principle

Initial exhaust valve conductance settings graph

Initial exhaust valve conductance settings graph

  • 1. Initial exhaust valve opening adjustment
    Adjust the initial exhaust rate before use without applying pilot pressure to pilot port S. Set the initial exhaust rate to zero by turning the adjustment nut clockwise until it stops. (Do not use tools.) Adjust the initial exhaust rate by turning the adjustment nut counterclockwise.
  • 2. Opening of the initial exhaust valve (valve S)
    When pilot pressure is applied to pilot port S, valve S separates from the valve S seal assembly and opens by the adjusted amount.
  • 3. Opening of the main exhaust valve (valve M)
    When pilot pressure is applied to pilot port M, the M valve separates from the body seat section and opens fully.
  • 4. Closing of the initial and main exhaust valves
    Remove the pilot pressure from pilot port S and pilot port M to return the S and M valves to their previous positions and seal them.

Note: The adjustment nut does not rotate during valve operation. However, rotation of the adjustment nut can be fixed to prevent operation errors. To fix the adjustment nut after setting it, tighten it to the torque shown under "A" Section Thread Tightening Torque" below. (Applying excessive torque can result in damaged components or abnormal noises.)

""A" Section Thread Tightening Torque

  • XLD-25/XLD-40/XLD-50: 0.08 N·m (0.8 kgf·cm) or less
  • XLD-63/XLD-80: 0.3 N·m (3 kgf·cm) or less

Product Options Descriptions

  • Auto switch (for main exhaust valve)
    The magnet actuates the auto switch. Uses 2 auto switches to detect the "opening and closing" positions and 1 auto switch to detect one of either the "open" or "closing" position. Auto switches operate at ordinary temperatures only (5 to 60°C).
  • Heater
    Simple heating using thermistors. The valve body can be heated to 100°C or 120°C, but this will differ depending on the valve size. The type and number of thermistors used will vary depending on the size and temperature setting. For high temperature specifications, the bonnet assembly is a heat resistant structure. This is not applicable for types with solenoid valves.

Notes

  • *The body material is A6063, the bellows material is SUS316L and the metal material used for other vacuum parts is SUS304. The standard seal material for vacuum parts is FKM, but other materials can be selected (see section on part number notation). Check that the fluid in use will not damage the selected material.
  • *Select a heat resistance for the actuation pressure tubing materials and fittings that is appropriate for the given operating temperature.
  • *The temperature of the switch part on the auto switch must be no higher than 60°C.
  • *When using with heaters (thermistors), install a device for preventing overheating.
  • *Refer to the manufacturer's catalog for parts other than those detailed above.
Données à afficher
30
45
60
  1. 1
Référence pièce
XLD-25L-M9//
XLD-40
XLD-40L-M9//
Référence pièce
Prix unitaire standard
Quantité minimale de commandeRemise sur volume
Jour
d'expédition standard
?
Éléments d'embase Conductance du son Direction du port pilote Référence de commutateur

884.79 €

1 26 jours 2514L/SSurface de bride, arrièrePas de commutateur auto (avec aimant intégré)

1,283.57 €

1 22 jours 4045L/SCôté bridePas de commutateur auto (pas d'aimant intégré)

1,060.13 €

1 22 jours 4045L/SSurface de bride, arrièrePas de commutateur auto (avec aimant intégré)

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  1. 1
 

Informations de base

Type Valve de dépression pneumatique Application Unité simple en fonctionnement Méthode d'installation Direct
Nombre de ports Vanne à 2 ports Type à commutation 2 positions, normalement fermé Type à port de tuyau Bride
Type à bride KF Type de joint Joint à soufflets Plage de températures(°C) 5 à 60
Nombre de commutateurs Pas de commutateur Matériau de joint FKM 1349-80 Quantité de fuite(Pa·m3/s) Interne : 1.3 × 10-10, Externe : 1.3 × 10-11
Traitement de surface du corps Externe : aluminium anodisé dur, interne : matériau de base Emplacement de remplacement du joint Aucun Chauffage Oui / Non Aucun

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