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XLH, Vanne coudée manuelle pour vide élevé, joint de soufflet de protection

XLH, Vanne coudée manuelle pour vide élevé, joint de soufflet de protection

Référence pièce:

encore indéterminée. 3 références possibles.
Quantité :

Informations sur le produit

Aluminum High Vacuum Angle Valve, Manual Type, Bellows Seal, XLH Series Specifications

XLH Series external appearance

XLH Series external appearance

Model XLH-16 XLH-25 XLH-40 XLH-50
Fluids Inert gas vacuum
Operating Temperature (°C) 5 to 150
Operating Pressure Pa (abs) 1 ×; 10-6 to atmospheric pressure
Conductance L/s Note 1: 5 14 45 80
Amount of leakage Pa·m3/s Internal For standard material (FKM): 1.3 ×; 10-10, values at normal temperature and excluding gas permeation
External For standard material (FKM): 1.3 ×; 10-11, values at normal temperature and excluding gas permeation
Flange Type KF (NW)
Main Material Main body: aluminum alloy, Bellows: SUS316L, Main parts: stainless steel, FKM (standard sealing material)
Surface Treatment External: hard anodized aluminum, Internal: base material
Actuation torque N·m 0.1 ≤ 0.15≦ 0.35≦ 0.5≦
Handle revolutions 5 7 10 13
Weight (kg) 0.23 0.41 1.05 1.62

Note 1: Conductance is the same as that of an elbow with the same dimensions.
Note 2: For valve heater specifications, see "Common Option (1) Heater" in the manufacturer's catalog.

Product Drawing

 

(Unit: mm)

 

XLH Series dimensional drawing

XLH Series dimensional drawing

Model A B C D E Note 1: F G H
XLH-16 40 100.5 38 1 - 30 17 35
XLH-25 50 114 48 1 12 40 26 41
XLH-40 65 162.5 66 2 11 55 41 57
XLH-50 70 179.5 79 2 11 75 52 70

Note 1: Dimension E applies when heater option is included. (Lead wire length: approx. 1 m)
Note 2: A, B, and C in the figure above indicate the heater mounting positions. The heater mounting positions differ by the heater type. Refer to the manufacturer's catalog for replacement heater part numbers and mounting positions.

Product Diagram

XLH Series diagram

XLH Series diagram

*Refer to the manufacturer's catalog for maintenance parts.

Product Working Principle

The valve opens by rotating the handle to the left. The handle does not move up and down. The indicator shows whether or not the valve is open or closed.
As the the handle turns to the right, the valve begins to close. The valve will be sealed when you no longer feel the turning force. The sealing force for the valve is provided by spring and is constant.

Product Options Descriptions

  • Heater
    Simple heating using thermistors. The valve body can be heated to 100°C or 120°C, but this will differ depending on the valve size. The type and number of thermistors used will vary depending on the size and temperature setting.
  • Indicator
    When the valve is open, an orange mark appears towards the center of the name plate.

Notes

  • *The body material is A6063, the bellows material is SUS316L and the metal material used for other vacuum parts is SUS304. The standard seal material for vacuum parts is FKM, but other materials can be selected (see section on part number notation). Check that the fluid in use will not damage the selected material.
  • *When using with heaters (thermistors), install a device for preventing overheating.
  • *Use within the operating pressure range.
  • *For gases which cause a large amount of deposits, either heat the valve body or use the type with a heater to prevent deposits in the valve.
  • *Refer to the manufacturer's catalog for parts other than those detailed above.

Liste des numéros de pièces

Nombre d’articles
  • 1
    • Référence pièce
    XLH-16
    XLH-25
    XLH-25-XN1A

    Éléments d'embase

    Conductance du son

    Matériau de joint

    Quantité de fuite

    (Pa·m3/s)

    Emplacement de remplacement du joint

    		Quantité minimale de commande
    16
    5L/S
    FKM 1349-80
    Interne : 1.3 × 10-10, Externe : 1.3 × 10-11
    Aucun
    1 pièces
    25
    14L/S
    FKM 1349-80
    Interne : 1.3 × 10-10, Externe : 1.3 × 10-11
    Aucun
    1 pièces
    25
    14L/S
    EPDM 2101-80
    Interne : 1,3 x 10–8, Externe : 1,3 x 10-9
    Joint d´étanchéité de soupape / joint d´étanchéité
    1 pièces
    Prix unitaire (hors TVA)(Prix unitaire TTC)
    Jour d'expédition standard
    440.59 €
    ( 524.30 € )
    4 jours ouvrables
    458.96 €
    ( 546.16 € )
    4 jours ouvrables
    460.73 €
    ( 548.27 € )
    26 jours ouvrables
  • 1

    • Plus d'informations

    Informations de base

    A high vacuum angle valve with a pressure-balanced structure that enables an unrestricted exhaust direction.
    [Features]
    · Bellows type is particulate-free and cleaned.
    · Low actuation torque (0.5 N·m or less).
    · Spring provides a standard sealing load.
    · Handle height remains the same regardless of whether valve is open or closed.
    · Equipped as standard with an indicator for confirming if the valve is open or closed.
    · Its low outgassing enables use with a smaller pump capacity and helps reduce exhaust time.
    · Does not contain heavy metals such as Ni (nickel) or Cr (chrome).
    · Low sputtering yield minimizes heavy metal contamination of wafers.

    Attention

    • Les images de produits peuvent être des images représentatives. Reportez-vous au catalogue pour plus de détails.